Wuhan Jiayitong Technology Co., Ltd
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Self standing 6-inch fast annealing furnace (RTP-3-06 series)
RTP-3-06系列自立式6吋快速退火炉采用红外辐射加热技术,可实现大尺寸样品(6英寸)快速升温和降温,可用于快速热处理(RTP)、快速热退火(RTA)、快速热氧化(RTO)、快速热氮化(RTN)及金属合金化等半导体工艺。
Product details

Product Features

  • Measurable large-sized samples:The size of the measurable single crystal sample is 6 inches (150mm).

  • Innovative design of pressure control system:High precision pressure control to meet different process requirements.

  • Storage heat treatment process:Convenient access to process parameters, improved experimental efficiency, and searchable data.

  • Rapid heating:The maximum heating rate can reach 150 ℃/s.

  • Program settings and gas path expansion:It can achieve precise control of different temperature ranges, automatically switch between cooling ranges, and save the process menu for easy access. By using MFC to precisely control gas flow, it can support up to 4 gas channels and achieve heat treatment in different atmospheric environments (vacuum, inert atmosphere, oxygen, hydrogen, mixed gas, etc.).

  • Fully automatic intelligent control:Adopting fully automatic intelligent control, including temperature, time, gas flow rate, vacuum, cooling water, etc., all of which can be automatically controlled.

  • Ultra high safety factor:Adopting triple safety measures including furnace door safety temperature opening protection, temperature controller opening permission protection, and equipment emergency stop safety protection, we comprehensively ensure the safety of equipment use.

  • Partition temperature controlControl heating power in different regions to improve temperature uniformity.

  • Domestic annealing furnace:Having independent research and development technology and manufacturing capabilities, able to quickly respond to customer after-sales needs.

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Successful operation!

Successful operation!